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Other articles related with "sputtered damage"：
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45201 |
Ming Gao(高明), Hui-Wei Du(杜汇伟), Jie Yang(杨洁), Lei Zhao(赵磊), Jing Xu(徐静), Zhong-Quan Ma(马忠权) |
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Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiOx/Si system |
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Chin. Phys. B
2017 Vol.26 (4): 45201-045201
[Abstract]
(556)
[HTML 1 KB]
[PDF 1051 KB]
(298)
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